发明申请
- 专利标题: POSITION-MEASURING DEVICE
- 专利标题(中): 位置测量装置
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申请号: US12962014申请日: 2010-12-07
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公开(公告)号: US20110141480A1公开(公告)日: 2011-06-16
- 发明人: Markus MEISSNER
- 申请人: Markus MEISSNER
- 优先权: DE102009054592.1 20091214
- 主分类号: G01B11/14
- IPC分类号: G01B11/14 ; G01B9/02
摘要:
A position-measuring device, for ascertaining the position of two objects which are disposed in a manner allowing movement relative to each other in at least one measuring direction, includes a light source, as well as a splitting device by which a light beam, provided by the light source, is split into two or more partial beams of rays. The partial beams of rays traverse at least two partial-beam paths. Interfering partial beams of rays from the partial-beam paths strike a plurality of opto-electronic detector elements, so that displacement-dependent position signals are ascertainable via the detector elements. The light source takes the form of a semiconductor laser having a fiber-grating feedback device.
公开/授权文献
- US08711367B2 Position-measuring device 公开/授权日:2014-04-29
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