发明申请
- 专利标题： TWO-TERMINAL VARIABLE CAPACITANCE MEMS DEVICE
- 专利标题（中）： 双端可变电容MEMS器件
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申请号： US12642421申请日： 2009-12-18
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公开(公告)号： US20110149374A1公开(公告)日： 2011-06-23
- 发明人: Je-Hsiung Lan , Evgeni Gousev , Ernest Tadashi Ozaki
- 申请人： Je-Hsiung Lan , Evgeni Gousev , Ernest Tadashi Ozaki
- 申请人地址： US CA San Diego
- 专利权人： QUALCOMM MEMS TECHNOLOGIES, INC.
- 当前专利权人： QUALCOMM MEMS TECHNOLOGIES, INC.
- 当前专利权人地址： US CA San Diego
- 主分类号： G02B26/02
- IPC分类号： G02B26/02 ; H01G7/00 ; H01G5/16 ; H01G5/40 ; H01L29/93
摘要：
A two-terminal, variable capacitance device is described that is constructed by connecting multiple MEMS devices having different actuation or “pull in” voltages in parallel.
公开/授权文献
- US08218228B2 Two-terminal variable capacitance MEMS device 公开/授权日：2012-07-10