发明申请
US20110159650A1 DMOS Type Semiconductor Device and Method for Manufacturing the same 有权
DMOS型半导体器件及其制造方法

  • 专利标题: DMOS Type Semiconductor Device and Method for Manufacturing the same
  • 专利标题(中): DMOS型半导体器件及其制造方法
  • 申请号: US13039636
    申请日: 2011-03-03
  • 公开(公告)号: US20110159650A1
    公开(公告)日: 2011-06-30
  • 发明人: Naohiro Shiraishi
  • 申请人: Naohiro Shiraishi
  • 优先权: JPP2007-190388 20070723
  • 主分类号: H01L21/336
  • IPC分类号: H01L21/336
DMOS Type Semiconductor Device and Method for Manufacturing the same
摘要:
A DMOS type semiconductor device and a method for manufacturing the same are provided. An isolation oxide layer with an ion implantation opening is formed on a semiconductor. A gate oxide film is formed on the semiconductor within the ion implantation opening. A gate is formed on the isolation oxide layer and the gate oxide film. A body layer diffusively formed in the semiconductor by implanting ions of an impurity element having a first conduction type from the ion implantation opening. A regulation layer which is shallower than the body layer is diffusively formed in the body layer by implanting ions of an impurity element having a second conduction type opposite to the first conduction type from the ion implantation opening. A source layer is diffusively formed in the regulation layer by implanting ions of an impurity element having the second conduction type from the ion implantation opening. The regulation layer is formed so as to horizontally extend beyond a region in which a gate bird's beak occurs from an end of the gate toward underlying layers of the gate.
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