发明申请
- 专利标题： DEPOSITION SYSTEMS AND METHODS
- 专利标题（中）： 沉积系统和方法
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申请号： US12651183申请日： 2009-12-31
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公开(公告)号： US20110159666A1公开(公告)日： 2011-06-30
- 发明人: John P. O'Connor
- 申请人： John P. O'Connor
- 主分类号： H01L21/36
- IPC分类号： H01L21/36 ; H01L21/46
摘要：
Systems, methods, and products made by a deposition process are shown and described. A work piece is supported in a main deposition chamber so that the work piece is positioned above each container of deposition material as the container is moved into and out of the deposition chamber. One or more containers are sequentially moved from each of a plurality of auxiliary chambers into and out of the deposition chamber so as to deposit material from each of the containers onto the work piece in a sequential manner.