发明申请
US20110165712A1 PROCESS FOR PRODUCING SURFACE-EMITTING LASER AND PROCESS FOR PRODUCING SURFACE-EMITTING LASER ARRAY
有权
生产表面发射激光的工艺和生产表面发射激光阵列的方法
- 专利标题: PROCESS FOR PRODUCING SURFACE-EMITTING LASER AND PROCESS FOR PRODUCING SURFACE-EMITTING LASER ARRAY
- 专利标题(中): 生产表面发射激光的工艺和生产表面发射激光阵列的方法
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申请号: US12983536申请日: 2011-01-03
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公开(公告)号: US20110165712A1公开(公告)日: 2011-07-07
- 发明人: Tatsuro Uchida
- 申请人: Tatsuro Uchida
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-000857 20100106
- 主分类号: H01L21/302
- IPC分类号: H01L21/302
摘要:
Provided is a producing of a surface-emitting laser capable of aligning a center axis of a surface relief structure with that of a current confinement structure with high precision to reduce a surface damage during the producing. The producing of the laser having the relief provided on a laminated semiconductor layer and a mesa structure, the process comprising the steps of: forming, on the layer, one of a first dielectric film and a first resist film having a first pattern for defining the mesa and a second pattern for defining the relief and then forming the other one of the films; forming a second resist film to cover the second pattern and expose the first pattern; and forming the mesa by removing the layer under the first pattern using the second resist film.
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