发明申请
- 专利标题: Gas Sensor
- 专利标题(中): 气体传感器
-
申请号: US13063600申请日: 2009-06-30
-
公开(公告)号: US20110169057A1公开(公告)日: 2011-07-14
- 发明人: Keiji Tsukada
- 申请人: Keiji Tsukada
- 申请人地址: JP Okayama-shi, Okayama
- 专利权人: National University Corporation Okayama University
- 当前专利权人: National University Corporation Okayama University
- 当前专利权人地址: JP Okayama-shi, Okayama
- 优先权: JP2008235414 20080912
- 国际申请: PCT/JP2009/061912 WO 20090630
- 主分类号: H01L27/088
- IPC分类号: H01L27/088
摘要:
[Object] To provide a gas sensor having a self-diagnostic function with a simplified structure.[Means of Realizing the Object] A gas sensor (30) includes two field-effect transistors and gate electrodes on gate insulation films (24) of the two field-effect transistors to detect gas using the gate electrodes. The gas sensor (30) includes a first gate electrode (5), a second gate electrode (6), and voltage applying means. The first gate electrode (5) is provided on one of the field-effect transistors. The second gate electrode (6) is provided on another one of the field-effect transistors. The voltage applying means is for, with the first gate electrode (5) and the second gate electrode (6) coupled to one another by wiring, applying thereto one of a direct-current voltage and an alternating-current voltage having a same potential or a constant voltage difference. The first gate electrode (5) and the second gate electrode (6) are made of different metals. The one field-effect transistor and the other field-effect transistor have approximately the same structures.
公开/授权文献
- US08283704B2 Gas sensor 公开/授权日:2012-10-09
信息查询
IPC分类: