发明申请
US20110171801A1 METHOD OF FABRICATING MULTI-FINGERED SEMICONDUCTOR DEVICES ON A COMMON SUBSTRATE 有权
在通用基板上制造多指尖半导体器件的方法

  • 专利标题: METHOD OF FABRICATING MULTI-FINGERED SEMICONDUCTOR DEVICES ON A COMMON SUBSTRATE
  • 专利标题(中): 在通用基板上制造多指尖半导体器件的方法
  • 申请号: US12684697
    申请日: 2010-01-08
  • 公开(公告)号: US20110171801A1
    公开(公告)日: 2011-07-14
  • 发明人: Akif SULTAN
  • 申请人: Akif SULTAN
  • 申请人地址: KY Grand Cayman
  • 专利权人: GLOBALFOUNDRIES INC.
  • 当前专利权人: GLOBALFOUNDRIES INC.
  • 当前专利权人地址: KY Grand Cayman
  • 主分类号: H01L21/336
  • IPC分类号: H01L21/336
METHOD OF FABRICATING MULTI-FINGERED SEMICONDUCTOR DEVICES ON A COMMON SUBSTRATE
摘要:
A method of fabricating p-type metal oxide semiconductor (PMOS) transistor devices on a common substrate is presented. The method provides a first portion of semiconductor material and a second portion of semiconductor material on the common substrate. The first portion of semiconductor material and the second portion of semiconductor material are insulated from each other. The method continues by creating first PMOS transistor devices using the first portion of semiconductor material. The first PMOS transistor devices include stressor regions that impart compressive stress to channel regions of the first PMOS transistor devices. The method also creates second PMOS transistor devices using the second portion of semiconductor material. The second PMOS transistor devices do not include channel stressor regions.
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