发明申请
- 专利标题: Multiaxial micromechanical acceleration sensor
- 专利标题(中): 多轴微机械加速度传感器
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申请号: US12308632申请日: 2007-11-14
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公开(公告)号: US20110174076A1公开(公告)日: 2011-07-21
- 发明人: Johannes Classen , Axel Franke , Dietrich Schubert , Kersten Kehr , Ralf Reichenbach
- 申请人: Johannes Classen , Axel Franke , Dietrich Schubert , Kersten Kehr , Ralf Reichenbach
- 优先权: DE102006062314.2 20061227
- 国际申请: PCT/EP2007/062307 WO 20071114
- 主分类号: G01P15/02
- IPC分类号: G01P15/02
摘要:
A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane.
公开/授权文献
- US08429971B2 Multiaxial micromechanical acceleration sensor 公开/授权日:2013-04-30