发明申请
US20110175170A1 STRUCTURE AND METHOD FOR MAKING LOW LEAKAGE AND LOW MISMATCH NMOSFET
失效
用于制造低漏电和低失真的NMOSFET的结构和方法
- 专利标题: STRUCTURE AND METHOD FOR MAKING LOW LEAKAGE AND LOW MISMATCH NMOSFET
- 专利标题(中): 用于制造低漏电和低失真的NMOSFET的结构和方法
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申请号: US12691183申请日: 2010-01-21
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公开(公告)号: US20110175170A1公开(公告)日: 2011-07-21
- 发明人: Xinlin Wang , Xiangdong Chen , Haining S. Yang
- 申请人: Xinlin Wang , Xiangdong Chen , Haining S. Yang
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L21/8238
摘要:
An improved SRAM and fabrication method are disclosed. The method comprises use of a nitride layer to encapsulate PFETs and logic NFETs, protecting the gates of those devices from oxygen exposure. NFETs that are used in the SRAM cells are exposed to oxygen during the anneal process, which alters the effective work function of the gate metal, such that the threshold voltage is increased, without the need for increasing the dopant concentration, which can adversely affect issues such as mismatch due to random dopant fluctuation, GIDL and junction leakage.
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