发明申请
- 专利标题: STACKED ESD PROTECTION
- 专利标题(中): 堆叠ESD保护
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申请号: US12689666申请日: 2010-01-19
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公开(公告)号: US20110176243A1公开(公告)日: 2011-07-21
- 发明人: Rouying Zhan , Amaury Gendron , Chai Ean Gill
- 申请人: Rouying Zhan , Amaury Gendron , Chai Ean Gill
- 申请人地址: US TX Austin
- 专利权人: FREESCALE SEMICONDUCTOR, INC.
- 当前专利权人: FREESCALE SEMICONDUCTOR, INC.
- 当前专利权人地址: US TX Austin
- 主分类号: H02H9/04
- IPC分类号: H02H9/04 ; H01L21/8222
摘要:
A stacked electrostatic discharge (ESD) protection clamp (99, 100-104) for protecting associated devices or circuits (24) comprises two or more series coupled (stacked) bipolar transistors (70, 700) whose individual trigger voltages Vt1 depend on their base-collector spacing D. A first (70-1, 700-1) of the transistors (70, 700) has a spacing DZ1 chosen within a D range Z1 whose slope (ΔVt1/ΔD) has a first value (ΔVt1/ΔD)Z1, and a second (70-2, 700-2) of the transistors (70, 700) has a spacing value D(Z2 or Z3) chosen within a D range Z2 or Z3 whose slope (ΔVt1/ΔD) has a second value (ΔVt1/ΔD)(Z2 or Z3) less than the first value (ΔVt1/ΔD)Z1. The sensitivity of the ESD stack trigger voltage Vt1STACK to base-collector spacing variations ΔD during manufacture is much reduced, for example, by as much as 50% for a 2-stack and more for 3-stacks and beyond. A wide range of Vt1STACK values can be obtained that are less sensitive to unavoidable manufacturing spacing variations ΔD.
公开/授权文献
- US08242566B2 Stacked ESD protection 公开/授权日:2012-08-14
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