发明申请
US20110180097A1 THERMAL ISOLATION ASSEMBLIES FOR WAFER TRANSPORT APPARATUS AND METHODS OF USE THEREOF
审中-公开
用于移动运输装置的热隔离组件及其使用方法
- 专利标题: THERMAL ISOLATION ASSEMBLIES FOR WAFER TRANSPORT APPARATUS AND METHODS OF USE THEREOF
- 专利标题(中): 用于移动运输装置的热隔离组件及其使用方法
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申请号: US12694597申请日: 2010-01-27
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公开(公告)号: US20110180097A1公开(公告)日: 2011-07-28
- 发明人: Armin Huseinovic , Ivan L. Berry
- 申请人: Armin Huseinovic , Ivan L. Berry
- 申请人地址: US MA Beverly
- 专利权人: AXCELIS TECHNOLOGIES, INC.
- 当前专利权人: AXCELIS TECHNOLOGIES, INC.
- 当前专利权人地址: US MA Beverly
- 主分类号: G03F7/42
- IPC分类号: G03F7/42
摘要:
An apparatus for treating a workpiece, the apparatus comprising a first chamber configured to treat the workpiece at an elevated temperature, the first chamber including an opening for receiving the workpiece; a second chamber in operative communication with the first chamber, the second chamber including an opening for transferring the workpiece to and from the first chamber, wherein the first chamber opening is aligned with the second chamber opening, and wherein a selected one of the first and the second chambers comprises a gate valve configured to selectively open and close access to the first and second chamber openings; and a thermal isolation plate formed of a material effective to substantially prevent heat transfer from the first chamber to the second chamber, wherein the thermal isolation plate is disposed about the first and second chamber openings in a sealing relationship.
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