发明申请
US20110181929A1 LASER PROCESSING DEVICE AND LASER PROCESSING METHOD 有权
激光加工设备和激光加工方法

LASER PROCESSING DEVICE AND LASER PROCESSING METHOD
摘要:
A laser processing device 1 includes a laser light source 10, a spatial light modulator 20, a control section 22, and a condensing optical system 30. The spatial light modulator 20 is input with a laser light output from the laser light source 10, presents a hologram for modulating the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and outputs the phase-modulated laser light. The control section 22 causes a part of the phase-modulated laser light (incident light) to be condensed at a condensing position existing in a processing region as a laser light (contribution light) having a constant energy not less than a predetermined threshold X. On the other hand, the control section 22 causes a laser light (unnecessary light) other than the contribution light condensed to the condensing position existing in the processing region to be dispersed and condensed at a condensing position existing in a non-processing region as a plurality of laser lights (non-contribution lights) having an energy less than the predetermined threshold X.
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