发明申请
- 专利标题: CRYSTALLIZATION METHOD OF AMORPHOUS SEMICONDUCTOR FILM, THIN FILM TRANSISTOR, AND MANUFACTURING METHOD OF THIN FILM TRANSISTOR
- 专利标题(中): 非晶半导体膜,薄膜晶体管的结晶方法和薄膜晶体管的制造方法
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申请号: US12967683申请日: 2010-12-14
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公开(公告)号: US20110186845A1公开(公告)日: 2011-08-04
- 发明人: Kazushi YAMAYOSHI , Kazutoshi Aoki
- 申请人: Kazushi YAMAYOSHI , Kazutoshi Aoki
- 申请人地址: JP Chiyoda-ku
- 专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人地址: JP Chiyoda-ku
- 优先权: JP2010-022154 20100203
- 主分类号: H01L29/24
- IPC分类号: H01L29/24 ; H01L21/84 ; H01L21/20
摘要:
Provided is a thin film transistor that includes a gate electrode formed in one major plane of a substrate, a gate insulating film covering the gate electrode, a semiconductor film formed opposite to the gate electrode with the gate insulating film interposed and including a first amorphous region to serve as a source region, a second amorphous region to serve as a drain region, and a crystalline region to serve as a channel region disposed between the first amorphous region and the second amorphous region, and a source electrode and a drain electrode formed above the semiconductor film without direct contact with the crystalline region and electrically connected to the source region and the drain region, respectively.
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