发明申请
- 专利标题： Mounting for deviation angle self compensating substantially achromatic retarder
- 专利标题（中）： 安装偏移角自补偿基本上消色差延迟器
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申请号： US13065090申请日： 2011-03-14
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公开(公告)号： US20110188040A1公开(公告)日： 2011-08-04
- 发明人: Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
- 申请人： Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
- 主分类号： G01J4/00
- IPC分类号： G01J4/00 ; G01J4/04
摘要：
A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.