发明申请
- 专利标题: THIN FILM TRANSISTOR AND DISPLAY DEVICE
- 专利标题(中): 薄膜晶体管和显示器件
-
申请号: US13010281申请日: 2011-01-20
-
公开(公告)号: US20110198606A1公开(公告)日: 2011-08-18
- 发明人: Koji Oda , Tomoyuki Irizumi , Naoki Nakagawa , Takeshi Ono
- 申请人: Koji Oda , Tomoyuki Irizumi , Naoki Nakagawa , Takeshi Ono
- 申请人地址: JP Chiyoda-ku
- 专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人地址: JP Chiyoda-ku
- 优先权: JP2010-028821 20100212
- 主分类号: H01L33/16
- IPC分类号: H01L33/16 ; H01L29/786
摘要:
An exemplary aspect of the present invention is a thin film transistor including: a gate electrode formed on a substrate; a gate insulating film that includes a nitride film and covers the gate electrode; and a semiconductor layer that is disposed to be opposed to the gate electrode with the gate insulating film interposed therebetween, and has a microcrystalline semiconductor layer formed in at least an interface in contact with the nitride film, in which the microcrystalline semiconductor layer contains oxygen at a concentration higher than that of contained nitrogen in at least the vicinity of the interface with the nitride film, the nitrogen being diffused from the nitride film.
公开/授权文献
信息查询
IPC分类: