发明申请
- 专利标题: APPARATUS AND METHOD FOR MANUFACTURING SUBSTRATE
- 专利标题(中): 用于制造基板的装置和方法
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申请号: US12762924申请日: 2010-04-19
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公开(公告)号: US20110200753A1公开(公告)日: 2011-08-18
- 发明人: Dong Joo Shin , Choon Keun Lee , Sung Taek Lim
- 申请人: Dong Joo Shin , Choon Keun Lee , Sung Taek Lim
- 优先权: KR10-2010-0013576 20100212
- 主分类号: B05D3/12
- IPC分类号: B05D3/12 ; B05C11/00
摘要:
Disclosed herein is an apparatus for manufacturing a substrate, including: a first chamber supplying an insulation layer; a second chamber including a roughening roller roughening at least one side of the insulation layer supplied from the first chamber, an evaporator depositing a metal layer on the roughened insulation layer, and a pressing roller pressing the insulation layer and the metal layer; and a third chamber storing the insulation layer including the metal layer formed thereon, the insulation layer being taken out from the second chamber. The apparatus for manufacturing a substrate is advantageous in that substrates are continuously produced, thus increasing the productivity of the substrates and preventing the substrates from being contaminated by the air.
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