发明申请
- 专利标题: SINGLE-CRYSTAL MANUFACTURING METHOD AND SINGLE-CRYSTAL MANUFACTURING APPARATUS
- 专利标题(中): 单晶制造方法和单晶制造设备
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申请号: US13125899申请日: 2009-10-19
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公开(公告)号: US20110214605A1公开(公告)日: 2011-09-08
- 发明人: Suguru Matsumoto , Susumu Sonokawa , Toshiharu Uesugi , Takashi Mori
- 申请人: Suguru Matsumoto , Susumu Sonokawa , Toshiharu Uesugi , Takashi Mori
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-310088 20081204
- 国际申请: PCT/JP2009/005438 WO 20091019
- 主分类号: C30B15/30
- IPC分类号: C30B15/30 ; C30B15/00
摘要:
The present invention provides a silicon single crystal manufacturing method for manufacturing a single crystal based on a horizontal magnetic field applied CZ method for pulling the single crystal while applying a horizontal magnetic field to a silicon raw material melt accommodated in a quartz crucible by a magnetic field application device, comprising: measuring a center position of the magnetic field generated by the magnetic field application device; and deviating the measured center position of the magnetic field from a pulling member serving as a rotation axis of the single crystal in a horizontal direction within the range of 2 to 14 mm before manufacture of the single crystal and/or during manufacture of the single crystal. As a result, the silicon single crystal manufacturing method and manufacturing apparatus that enable manufacture of a single crystal while suppressing fluctuations in diameter and in oxygen concentration without a variation caused due to characteristics of the apparatus can be provided.
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