发明申请
- 专利标题: SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 半导体存储器件及其制造方法
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申请号: US13108174申请日: 2011-05-16
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公开(公告)号: US20110215288A1公开(公告)日: 2011-09-08
- 发明人: Yuichi MATSUI , Tomio IWASAKI , Norikatsu TAKAURA , Kenzo KUROTSUCHI
- 申请人: Yuichi MATSUI , Tomio IWASAKI , Norikatsu TAKAURA , Kenzo KUROTSUCHI
- 申请人地址: JP Kanagawa
- 专利权人: RENESAS ELECTRONICS CORPORATION
- 当前专利权人: RENESAS ELECTRONICS CORPORATION
- 当前专利权人地址: JP Kanagawa
- 优先权: JP2005-146387 20050519; JP2006-096616 20060331
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
Since a chalcogenide material has low adhesion to a silicon oxide film, there is a problem in that it tends to separate from the film during the manufacturing step of a phase change memory. In addition, since the chalcogenide material has to be heated to its melting point or higher during resetting (amorphization) of the phase change memory, there is a problem of requiring extremely large rewriting current. An interfacial layer includes an extremely thin insulator or semiconductor having the function as both an adhesive layer and a high resistance layer (thermal resistance layer) is inserted between chalcogenide material layer/interlayer insulative film and between chalcogenide material layer/plug.
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