发明申请
- 专利标题： MEMS DEVICE
- 专利标题（中）： MEMS器件
-
申请号： US13039644申请日： 2011-03-03
-
公开(公告)号： US20110222204A1公开(公告)日： 2011-09-15
- 发明人: Xiaoyu MI , Osamu Toyoda , Satoshi Ueda
- 申请人： Xiaoyu MI , Osamu Toyoda , Satoshi Ueda
- 申请人地址： JP Kawasaki
- 专利权人： FUJITSU LIMITED
- 当前专利权人： FUJITSU LIMITED
- 当前专利权人地址： JP Kawasaki
- 优先权： JPJP2010-054421 20100311
- 主分类号： H01G7/00
- IPC分类号： H01G7/00
摘要：
A MEMS device includes a substrate, a fixed electrode that is provided on the substrate and allows a signal to pass therethrough, a movable electrode that is provided above the substrate in a manner to face the fixed electrode and allows a signal to pass therethrough, a driving line that is provided inside the substrate and used to apply a driving voltage to displace the movable electrode, and a resistance that is provided in a first via hole formed inside the substrate and used to cutoff a signal. The fixed electrode or the movable electrode is connected to the driving line through the first resistance.
公开/授权文献
- US08508910B2 MEMS device 公开/授权日：2013-08-13
信息查询
