发明申请
- 专利标题： ELECTROLYTE LOOP WITH PRESSURE REGULATION FOR SEPARATED ANODE CHAMBER OF ELECTROPLATING SYSTEM
- 专利标题（中）： 用于电镀系统分离阳极室的电压调节电解质环路
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申请号： US13051822申请日： 2011-03-18
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公开(公告)号： US20110226614A1公开(公告)日： 2011-09-22
- 发明人: Robert Rash , Richard Abraham , David W. Porter , Steven T. Mayer
- 申请人： Robert Rash , Richard Abraham , David W. Porter , Steven T. Mayer
- 主分类号： C25B15/08
- IPC分类号： C25B15/08 ; C25B15/00 ; C25B15/02
摘要：
An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.
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