发明申请
US20110227061A1 SEMICONDUCTOR OXIDE NANOFIBER-NANOROD HYBRID STRUCTURE AND ENVIRONMENTAL GAS SENSOR USING THE SAME
审中-公开
半导体氧化物NANOFIBER-NANOROD混合结构和使用其的环境气体传感器
- 专利标题: SEMICONDUCTOR OXIDE NANOFIBER-NANOROD HYBRID STRUCTURE AND ENVIRONMENTAL GAS SENSOR USING THE SAME
- 专利标题(中): 半导体氧化物NANOFIBER-NANOROD混合结构和使用其的环境气体传感器
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申请号: US12948022申请日: 2010-11-17
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公开(公告)号: US20110227061A1公开(公告)日: 2011-09-22
- 发明人: Su Jae Lee , Chae Ryong Cho
- 申请人: Su Jae Lee , Chae Ryong Cho
- 申请人地址: KR Daejeon KR Busan
- 专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE,INSTITUTE FOR RESEARCH AND INDUSTRY COOPERATION PUSAN NATIONAL UNIVERSITY
- 当前专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE,INSTITUTE FOR RESEARCH AND INDUSTRY COOPERATION PUSAN NATIONAL UNIVERSITY
- 当前专利权人地址: KR Daejeon KR Busan
- 优先权: KR10-2010-0023616 20100317
- 主分类号: H01L29/12
- IPC分类号: H01L29/12 ; H01L21/64 ; B82Y99/00 ; B82Y40/00
摘要:
Provided is an environmental gas sensor including an insulating substrate, a metal electrode formed above the insulating substrate, and a sensing layer formed of a semiconductor oxide nanofiber-nanorod hybrid structure above the metal electrode. The environmental gas sensor can have excellent characteristics of ultra high sensitivity, high selectivity, high responsiveness and low power consumption by forming a semiconductor oxide nanorod having high sensitivity to a specific gas on a semiconductor oxide nanofiber.
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