发明申请
- 专利标题: Phase-shifting element and particle beam device having a phase-shifting element
- 专利标题(中): 具有相移元件的相移元件和粒子束器件
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申请号: US12931046申请日: 2011-01-20
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公开(公告)号: US20110233402A1公开(公告)日: 2011-09-29
- 发明人: Rasmus Schröder , Bastian Barton , Gerd Benner , Harald Rose
- 申请人: Rasmus Schröder , Bastian Barton , Gerd Benner , Harald Rose
- 优先权: DE102007007923.2 20070214
- 主分类号: H01J37/26
- IPC分类号: H01J37/26
摘要:
A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.
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