发明申请
- 专利标题： PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, LIQUID DROPLET EJECTING HEAD, LIQUID DROPLET EJECTING APPARATUS, AND METHOD OF PRODUCING PIEZOELECTRIC ELEMENT
- 专利标题（中）： 压电元件，压电致动器，液滴喷射头，液滴喷射装置以及压电元件的制造方法
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申请号： US13069343申请日： 2011-03-22
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公开(公告)号： US20110234704A1公开(公告)日： 2011-09-29
- 发明人: Hideki Hahiro , Koji Ohashi , Masao Nakayama
- 申请人： Hideki Hahiro , Koji Ohashi , Masao Nakayama
- 申请人地址： JP Shinjuku-ku
- 专利权人： SEIKO EPSON CORPORATION
- 当前专利权人： SEIKO EPSON CORPORATION
- 当前专利权人地址： JP Shinjuku-ku
- 优先权： JP2010-065847 20100323
- 主分类号： B41J2/045
- IPC分类号： B41J2/045 ; H01L41/04 ; H01L41/22
摘要：
The piezoelectric element includes a first electrode disposed on a substrate, a piezoelectric material layer disposed on the first electrode, a second electrode disposed on the piezoelectric material layer, and a protective film covering at least a side surface of the piezoelectric material layer. The side surface of the piezoelectric material layer has a plurality of grooves extending along the direction from the second electrode toward the first electrode.
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