Invention Application
- Patent Title: APPARATUS FOR TRANSFERRING ELECTRONIC COMPONENTS IN STAGES
- Patent Title (中): 用于在阶段转移电子元件的装置
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Application No.: US12748777Application Date: 2010-03-29
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Publication No.: US20110236161A1Publication Date: 2011-09-29
- Inventor: Chi Wah CHENG , Wang Lung TSE , Leung Por CHAN
- Applicant: Chi Wah CHENG , Wang Lung TSE , Leung Por CHAN
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677

Abstract:
A transfer assembly for transferring first and second groups of electronic components simultaneously comprises a holding plate containing first and second sets of suction holes. The respective first and second sets of suction holes are operative to hold the first and second groups of electronic components respectively against the holding plate during transfer of the electronic components. A first vacuum chamber located next to the holding plate is connected only to the first set of suction holes. A vacuum compartment located within the first vacuum chamber encloses a second vacuum chamber. The vacuum compartment includes a sealing sheet in contact with the holding plate which has vacuum holes connecting the second vacuum chamber to the second set of suction holes. First and second vacuum sources are provided for applying vacuum suction forces separately in the first and second vacuum chambers.
Public/Granted literature
- US08251422B2 Apparatus for transferring electronic components in stages Public/Granted day:2012-08-28
Information query
IPC分类: