发明申请
- 专利标题: SURFACE-MOUNTABLE QUARTZ-CRYSTAL DEVICES AND METHODS FOR MANUFACTURING SAME
- 专利标题(中): 表面可调晶体晶体装置及其制造方法
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申请号: US13075121申请日: 2011-03-29
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公开(公告)号: US20110241491A1公开(公告)日: 2011-10-06
- 发明人: Takehiro Takahashi
- 申请人: Takehiro Takahashi
- 专利权人: Nihon Dempa Kogyo Co., LTD.
- 当前专利权人: Nihon Dempa Kogyo Co., LTD.
- 优先权: JP2010-080195 20100331
- 主分类号: H01L41/053
- IPC分类号: H01L41/053 ; H01L41/04 ; H01L41/22
摘要:
In an exemplary method for making crystal vibrating devices, four wafers are provided: a crystal wafer, a base wafer, a first-lid wafer, and a second-lid wafer. The crystal wafer defines multiple crystal vibrating pieces including respective frames and respective electrodes formed on both main surfaces thereof. The base wafer defines multiple base plates bondable to one main surface of respective frames. The first-lid wafer defines multiple first lids bondable to the other main surface of the respective frames. Each first lid defines a void registrable with respective electrodes. The second-lid wafer is sized similarly to and bondable to the first-lid wafer so as to sealably close the voids. In a first bonding step the crystal wafer is bonded to the base wafer and first-lid wafer. In a subsequent adjustment step the thickness of at least one electrode per each crystal vibrating piece is adjusted to adjust the vibrational frequency of the respective vibrating portion. Thickness adjustment occurs through the respective voids. In a second bonding step, the second-lid wafer is bonded to the first-lid wafer. The resulting wafer sandwich is cut up into individual quartz crystal devices.
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