发明申请
- 专利标题： DETECTION APPARATUS, METHOD OF MANUFACTURING THE SAME, AND DETECTION SYSTEM
- 专利标题（中）： 检测装置，其制造方法和检测系统
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申请号： US13049975申请日： 2011-03-17
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公开(公告)号： US20110248176A1公开(公告)日： 2011-10-13
- 发明人: Chiori Mochizuki , Minoru Watanabe , Takamasa Ishii , Jun Kawanabe , Kentaro Fujiyoshi
- 申请人： Chiori Mochizuki , Minoru Watanabe , Takamasa Ishii , Jun Kawanabe , Kentaro Fujiyoshi
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2010-092626 20100413; JP2011-029087 20110214
- 主分类号： G01T1/20
- IPC分类号： G01T1/20 ; G01T1/24 ; H01L31/18
摘要：
A detection apparatus comprising a substrate; a switching element arranged over the substrate and including a plurality of electrodes; a conductive line arranged over the substrate and electrically connected to a first electrode of the plurality of electrodes of the switching element; and a conversion element including a semiconductor layer arranged over the switching element and the conductive line and arranged between two electrodes, one electrode of the two electrodes being electrically connected to a second electrode of the plurality of electrodes of the switching element, is provided. The one electrode of the conversion element is arranged over the switching element and the conductive line through a space formed between the one electrode and the first electrode of the switching element or between the one electrode and the conductive line.