发明申请
US20110262867A1 METHOD OF CREATING AN EVALUATION MAP, SYSTEM, METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND COMPUTER PROGRAM PRODUCT
审中-公开
创建评估图的方法，系统，制造半导体器件和计算机程序产品的方法
- 专利标题： METHOD OF CREATING AN EVALUATION MAP, SYSTEM, METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND COMPUTER PROGRAM PRODUCT
- 专利标题（中）： 创建评估图的方法，系统，制造半导体器件和计算机程序产品的方法
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申请号： US13052840申请日： 2011-03-21
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公开(公告)号： US20110262867A1公开(公告)日： 2011-10-27
- 发明人: Taiga UNO , Yukiyasu Arisawa
- 申请人： Taiga UNO , Yukiyasu Arisawa
- 优先权： JP2010-098957 20100422
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G06F17/50
摘要：
According to one embodiment, evaluation map creating method is disclosed. The method determines number (N) of times on changing division starting position of layout for segmenting the layout into areas M to create the map by segmenting the layout into areas m and obtaining evaluation value v corresponding to area m (P1). The layout is divided by areas M larger than area m by changing the position, centers of k pieces of areas mk among areas m coincide centers of k pieces of areas M among areas M (P2). Pattern densities D of the layout in areas M is obtained (P3). Evaluation values Vk on areas Mk are calculated by convolving pattern density D for each of areas M with distribution function F (P4). The P2-P4 are repeated N times and obtained N pieces of evaluation values Vk are synthesized (P5).
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