发明申请
- 专利标题: TEST GLASS CHANGING SYSTEM
- 专利标题(中): 测试玻璃变化系统
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申请号: US13127520申请日: 2009-11-05
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公开(公告)号: US20110265583A1公开(公告)日: 2011-11-03
- 发明人: Michael Scherer
- 申请人: Michael Scherer
- 申请人地址: DE Alzenau
- 专利权人: LEYBOLD OPTICS GMBH
- 当前专利权人: LEYBOLD OPTICS GMBH
- 当前专利权人地址: DE Alzenau
- 优先权: DE102008056125.8 20081106
- 国际申请: PCT/EP2009/007938 WO 20091105
- 主分类号: G01N37/00
- IPC分类号: G01N37/00
摘要:
The invention relates to a test glass changing system (10) for selectively coating and optically measuring a test glass (24, 24″) in a coating chamber (1) of a vacuum coating installation (3). In the coating chamber, a movable turntable (2) is used to guide substrates (7) on a path through a stream of a coating material. The test glass changing system (10) comprises a test glass holder (8, 8″) with a test glass plate (26) for holding the test glass (24, 24″), and a cover (28, 28″) for selectively covering the test glass plate (26). The test glass changing system (10) also comprises a rotary apparatus (34) for rotating the test glass plate (26) about an axis (51) which is oriented approximately parallel to the axis of rotation (5) of the turntable (2). The test glass holder (8, 8″) can be positioned on the turntable (2) and removed from the coating chamber (1) in the form of a unit.
公开/授权文献
- US09157147B2 Test glass changing system 公开/授权日:2015-10-13
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