发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US13094933申请日: 2011-04-27
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公开(公告)号: US20110266542A1公开(公告)日: 2011-11-03
- 发明人: Min Ki RYU , Sang Hee Park , Chi Sun Hwang , Kyoung Ik Cho
- 申请人: Min Ki RYU , Sang Hee Park , Chi Sun Hwang , Kyoung Ik Cho
- 申请人地址: KR Daejeon
- 专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2010-0039411 20100428
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; H01L21/336
摘要:
Provided are a semiconductor device including a dual gate transistor and a method of fabricating the same. The semiconductor device includes a lower gate electrode, an upper gate electrode on the lower gate electrode, a contact plug interposed between the lower gate electrode and the upper gate electrode, and connecting the lower gate electrode to the upper gate electrode, and a functional electrode spaced apart from the upper gate electrode and formed at the same height as the upper gate electrode. The dual gate transistor exhibiting high field effect mobility is applied to the semiconductor device, so that characteristics of the semiconductor device can be improved. In particular, since no additional mask or deposition process is necessary, a large-area high-definition semiconductor device can be mass-produced with neither an increase in process cost nor a decrease in yield.
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