发明申请
- 专利标题： Method of Performing Model-Based Scanner Tuning
- 专利标题（中）： 执行基于模型的扫描仪调谐的方法
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申请号： US13182416申请日： 2011-07-13
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公开(公告)号： US20110267597A1公开(公告)日： 2011-11-03
- 发明人: Jun Ye , Yu Cao
- 申请人： Jun Ye , Yu Cao
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 主分类号： G03B27/32
- IPC分类号： G03B27/32
摘要：
A model-based tuning method for tuning a first lithography system utilizing a reference lithography system, each of which has tunable parameters for controlling imaging performance. The method includes the steps of defining a test pattern and an imaging model; imaging the test pattern utilizing the reference lithography system and measuring the imaging results; imaging the test pattern utilizing the first lithography system and measuring the imaging results; calibrating the imaging model utilizing the imaging results corresponding to the reference lithography system, where the calibrated imaging model has a first set of parameter values; tuning the calibrated imaging model utilizing the imaging results corresponding to the first lithography system, where the tuned calibrated model has a second set of parameter values; and adjusting the parameters of the first lithography system based on a difference between the first set of parameter values and the second set of parameter values.
公开/授权文献
- US09158208B2 Method of performing model-based scanner tuning 公开/授权日：2015-10-13
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