发明申请
US20110274299A1 ENCAPSULATED MICRO-ELECTRO-MECHANICAL DEVICE, IN PARTICULAR A MEMS ACOUSTIC TRANSDUCER
有权
封装的微电子机械装置,特别是MEMS声学传感器
- 专利标题: ENCAPSULATED MICRO-ELECTRO-MECHANICAL DEVICE, IN PARTICULAR A MEMS ACOUSTIC TRANSDUCER
- 专利标题(中): 封装的微电子机械装置,特别是MEMS声学传感器
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申请号: US13102831申请日: 2011-05-06
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公开(公告)号: US20110274299A1公开(公告)日: 2011-11-10
- 发明人: Mark Andrew Shaw , Gianmarco Antonio Camillo
- 申请人: Mark Andrew Shaw , Gianmarco Antonio Camillo
- 申请人地址: IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人地址: IT Agrate Brianza
- 优先权: ITTO2010A000380 20100506
- 主分类号: H04R1/00
- IPC分类号: H04R1/00 ; H01L21/02
摘要:
An encapsulated micro-electro-mechanical device, wherein a MEMS chip is encapsulated by a package formed by a first, a second, and a third substrates that are bonded together. The first substrate has a main surface bearing the MEMS chip, the second substrate is bonded to the first substrate and defines a chamber surrounding the MEMS chip, and the third substrate is bonded to the second substrate and upwardly closes the chamber. A grid or mesh structure of electrically conductive material is formed in or on the third substrate and overlies the MEMS chip; the second substrate has a conductive connection structure coating the walls of the chamber, and the first substrate incorporates an electrically conductive region, which forms, together with the conductive layer and the grid or mesh structure, a Faraday cage.
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