发明申请
- 专利标题： MULTIPLE ANODE ION SOURCE
- 专利标题（中）： 多阳极离子源
-
申请号： US13192251申请日： 2011-07-27
-
公开(公告)号： US20110278156A1公开(公告)日： 2011-11-17
- 发明人: Paul Stephen McLeod , Kueir-Weei Chour
- 申请人： Paul Stephen McLeod , Kueir-Weei Chour
- 专利权人： Seagate Technology LLC
- 当前专利权人： Seagate Technology LLC
- 主分类号： G11B5/851
- IPC分类号： G11B5/851 ; C23C14/34
摘要：
An ion source is provided. The ion source comprises a first cylindrical anode and a second cylindrical anode. The first cylindrical anode is concentric with the second cylindrical anode. The ion source further comprises an electron source positioned within the first cylindrical anode or the second cylindrical anode.
公开/授权文献
- US08946651B2 Multiple anode ion source 公开/授权日：2015-02-03
信息查询
IPC分类:
