发明申请
US20110278540A1 FIELD-EFFECT TRANSISTOR 审中-公开
场效应晶体管

FIELD-EFFECT TRANSISTOR
摘要:
Provided is a field-effect transistor which is capable of suppressing current collapse. An HEMT as the field-effect transistor includes: a first semiconductor layer made of a first nitride semiconductor; and a second semiconductor layer formed on the first semiconductor layer and made of a second nitride semiconductor having a greater band gap than a band gap of the first nitride semiconductor, wherein the first semiconductor layer includes a region in which a threading dislocation density increases in a stacking direction.
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