发明申请
US20110279820A1 DUV-UV BAND SPECTROSCOPIC OPTICAL SYSTEM AND SPECTROMETER USING SAME
有权
DUV-UV带光谱系统和使用它的光谱仪
- 专利标题: DUV-UV BAND SPECTROSCOPIC OPTICAL SYSTEM AND SPECTROMETER USING SAME
- 专利标题(中): DUV-UV带光谱系统和使用它的光谱仪
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申请号: US13145942申请日: 2009-12-17
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公开(公告)号: US20110279820A1公开(公告)日: 2011-11-17
- 发明人: Keiko Oka , Yasuhiro Yoshitake
- 申请人: Keiko Oka , Yasuhiro Yoshitake
- 优先权: JP2009-044231 20090226
- 国际申请: PCT/JP2009/006963 WO 20091217
- 主分类号: G01N21/47
- IPC分类号: G01N21/47
摘要:
Disclosed are a spectroscopic optical system and a spectrometer both enabling vertical illumination by means of an optical system using only refractive lenses and enabling wide-band color correction in the DUV-UV (190 to 400 nm) range. The spectroscopic optical system and spectrometer each comprise a light source (100), a folding mirror (110), a field stop (120), an object-side focusing lens system (130) for focusing light onto a sample, an image-side focusing lens (140) disposed on the image forming plane of the object-side focusing lens system, and a spectroscope (150) for dispersing regularly reflected light from the sample. The object-side focusing lens system (130) and the image-side focusing lens system (140) are each a spectroscopic optical system corrected with respect to color in a broad band of wavelength from 190 to 400 nm and configured from only refractive lenses enabling vertical illumination. The working distance (WD) of each lens is set shorter than a predetermined distance, and the doublet interval (D) is set longer than a predetermined distance.
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