发明申请
- 专利标题： VACUUM DEVICE
- 专利标题（中）： 真空装置
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申请号： US13147466申请日： 2010-02-05
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公开(公告)号： US20110283623A1公开(公告)日： 2011-11-24
- 发明人: Yusuke Ozaki , Katsushi Kishimoto , Nobuyuki Tanigawa , Yusuke Fukuoka
- 申请人： Yusuke Ozaki , Katsushi Kishimoto , Nobuyuki Tanigawa , Yusuke Fukuoka
- 优先权： JP2009026418 20090206
- 国际申请： PCT/JP2010/051703 WO 20100205
- 主分类号： E06B3/46
- IPC分类号： E06B3/46 ; E05F11/54 ; E05D15/06
摘要：
A vacuum chamber has an opening. A door is to close the opening. A first rail extends in a first direction with a space between the first rail and the opening when viewed in a planar view. Further, the first rail supports the door to be movable in the first direction. Further, the first rail has a portion facing the opening in a second direction crossing the first direction when viewed in a planar view. Furthermore, the first rail has a first movable portion movable in the second direction.
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IPC分类:
