发明申请
- 专利标题： IMAGING APPARATUS HAVING PHOTOSENSOR AND MANUFACTURING METHOD OF THE SAME
- 专利标题（中）： 具有光电传感器的成像装置及其制造方法
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申请号： US13115348申请日： 2011-05-25
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公开(公告)号： US20110291212A1公开(公告)日： 2011-12-01
- 发明人: Ichiro Mihara , Takeshi Wakabayashi
- 申请人： Ichiro Mihara , Takeshi Wakabayashi
- 申请人地址： JP Tokyo
- 专利权人： CASIO COMPUTER CO., LTD.
- 当前专利权人： CASIO COMPUTER CO., LTD.
- 当前专利权人地址： JP Tokyo
- 优先权： JP2010-123117 20100528
- 主分类号： H01L31/0232
- IPC分类号： H01L31/0232 ; H01L31/18
摘要：
A photosensor comprises a photoelectric conversion device region and a connection pad on the lower surface of a semiconductor substrate, and also comprises a wiring line connected to the connection pad via insulating film under the semiconductor substrate, and a columnar electrode as an external connection electrode connected to the wiring line. As a result, as compared with the case where the photoelectric conversion device region and the connection pad connected to the photoelectric conversion device region are formed on the upper surface of the semiconductor substrate, a piercing electrode for connecting the connection pad and the wiring line does not have to be formed in the semiconductor substrate. Thus, the number of steps can be smaller, and a fabrication process can be less restricted.