Invention Application
- Patent Title: INTEGRATED CIRCUITS HAVING DUMMY GATE ELECTRODES AND METHODS OF FORMING THE SAME
- Patent Title (中): 具有双门电极的集成电路及其形成方法
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Application No.: US12795144Application Date: 2010-06-07
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Publication No.: US20110298059A1Publication Date: 2011-12-08
- Inventor: Mei-Hui HUANG , Chan-Hong CHERN
- Applicant: Mei-Hui HUANG , Chan-Hong CHERN
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/336

Abstract:
An integrated circuit includes at least one first gate electrode of at least one active transistor. At least one first dummy gate electrode is disposed adjacent to a first side edge of the at least one first gate electrode. At least one second dummy gate electrode is disposed adjacent to a second side edge of the at least one first gate electrode. The second side edge is opposite to the first side edge. At least one guard ring is disposed around the at least one first gate electrode, the at least one first dummy gate electrode, and the at least one second dummy gate electrode. An ion implantation layer of the at least one guard ring substantially touches at least one of the at least one first dummy gate electrode and the at least one second dummy gate electrode.
Public/Granted literature
- US08350339B2 Integrated circuits having dummy gate electrodes and methods of forming the same Public/Granted day:2013-01-08
Information query
IPC分类: