Various methods and systems are provided for the fabrication of patterned nanofibers. In one embodiment, a method includes generating a layer of electrospun nanofibers from a polymer solution and patterning the layer of electrospun nanofibers using ultraviolet (UV) lithography. The patterned electrospun nanofibers may then be thermally treated to form patterned carbon nanofibers. In another embodiment, a device includes a layer of patterned carbon nanofibers formed by generating electrospun nanofibers from a polymer solution, patterning the electrospun nanofibers using UV lithography, and converting the patterned electrospun nanofibers into patterned carbon nanofibers using a thermal treatment. In another embodiment, a method includes depositing electrospun nanofibers for a first predefined period of time, dissipating charge on the deposited electrospun nanofibers for a second predefined period of time where no electrospun nanofibers are deposited, and sequentially repeating the depositing and dissipating steps to from a layer of electrospun nanofibers having a predefined thickness.