发明申请
- 专利标题: Method of crystallizing silicon layer and method of forming a thin film transistor using the same
- 专利标题(中): 使硅层结晶的方法和使用其形成薄膜晶体管的方法
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申请号: US13067384申请日: 2011-05-27
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公开(公告)号: US20110300674A1公开(公告)日: 2011-12-08
- 发明人: Yun-Mo Chung , Ki-Yong Lee , Jin-Wook Seo , Min-Jae Jeong , Yong-Duck Son , Byung-Soo So , Seung-Kyu Park , Byoung-Keon Park , Dong-Hyun Lee , Kil-Won Lee , Tak-Young Lee , Jong-Ryuk Park
- 申请人: Yun-Mo Chung , Ki-Yong Lee , Jin-Wook Seo , Min-Jae Jeong , Yong-Duck Son , Byung-Soo So , Seung-Kyu Park , Byoung-Keon Park , Dong-Hyun Lee , Kil-Won Lee , Tak-Young Lee , Jong-Ryuk Park
- 优先权: KR10-2010-0052353 20100603
- 主分类号: H01L21/30
- IPC分类号: H01L21/30 ; H01L21/336
摘要:
A method of crystallizing a silicon layer and a method of manufacturing a thin film transistor using the same, the method of crystallizing the silicon layer including forming an amorphous silicon layer on a substrate; performing a hydrophobicity treatment on a surface of the amorphous silicon layer so as to obtain a hydrophobic surface thereon; forming a metallic catalyst on the amorphous silicon layer that has been subjected to the hydrophobicity treatment; and heat-treating the amorphous silicon layer including the metallic catalyst thereon to crystallize the amorphous silicon layer into a polycrystalline silicon layer.
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