发明申请
US20110300674A1 Method of crystallizing silicon layer and method of forming a thin film transistor using the same 有权
使硅层结晶的方法和使用其形成薄膜晶体管的方法

Method of crystallizing silicon layer and method of forming a thin film transistor using the same
摘要:
A method of crystallizing a silicon layer and a method of manufacturing a thin film transistor using the same, the method of crystallizing the silicon layer including forming an amorphous silicon layer on a substrate; performing a hydrophobicity treatment on a surface of the amorphous silicon layer so as to obtain a hydrophobic surface thereon; forming a metallic catalyst on the amorphous silicon layer that has been subjected to the hydrophobicity treatment; and heat-treating the amorphous silicon layer including the metallic catalyst thereon to crystallize the amorphous silicon layer into a polycrystalline silicon layer.
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