发明申请
US20110303008A1 CANTILEVER BEAM STRUCTURAL RESONANT-TYPE INTEGRATED OPTICAL WAVEGUIDE ACCELEROMETER
有权
CANTILEVER梁结构谐振型集成光波导加速度计
- 专利标题: CANTILEVER BEAM STRUCTURAL RESONANT-TYPE INTEGRATED OPTICAL WAVEGUIDE ACCELEROMETER
- 专利标题(中): CANTILEVER梁结构谐振型集成光波导加速度计
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申请号: US13202755申请日: 2009-09-23
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公开(公告)号: US20110303008A1公开(公告)日: 2011-12-15
- 发明人: Tong Zhang , Xiaojun Xue , Xiaoyang Zhang , Pengqin Wu
- 申请人: Tong Zhang , Xiaojun Xue , Xiaoyang Zhang , Pengqin Wu
- 优先权: CN200910024475.3 20090223
- 国际申请: PCT/CN2009/074144 WO 20090923
- 主分类号: G01P15/093
- IPC分类号: G01P15/093
摘要:
A cantilever beam structural resonant-type integrated optical waveguide accelerometer, includes an input waveguide (1), a dissymmetrical structural Mach-Zehnder interferometer (2), a micro-mechanical vibration cantilever beam (3), a short curved waveguide (4) and an output waveguide (5); all the waveguide structures and the cantilever beam use the integrated optical micromachining technique, and the device single-scale integration can be realized by using the temperature-insensitive organic polymer optical waveguide structure and the organic polymer substrate, the key technique indexes such as detection sensitivity, dynamic range are extensively adjusted. The phase difference of the optical signal can be measured by detecting the optical intensity of the resonant frequency of the optical circuit so as to achieve high sensitive acceleration detection, and to be free from the effect of the ambient temperature disturbance and waveguide birefringence.
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