发明申请
- 专利标题: Thin-Film Piezoelectric Acoustic Wave Resonator and High-Frequency Filter
- 专利标题(中): 薄膜压电声波谐振器和高频滤波器
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申请号: US13201344申请日: 2010-02-18
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公开(公告)号: US20110304243A1公开(公告)日: 2011-12-15
- 发明人: Atsushi Isobe , Kengo Asai
- 申请人: Atsushi Isobe , Kengo Asai
- 申请人地址: JP Chiyoda-ku, Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Chiyoda-ku, Tokyo
- 优先权: JP2009053521 20090306
- 国际申请: PCT/JP2010/052447 WO 20100218
- 主分类号: H01L41/04
- IPC分类号: H01L41/04
摘要:
A thin-film piezoelectric acoustic wave resonator that has a large k2, can trap acoustic energy in a resonating part, does not excite spurious resonance, or can finely adjust resonance frequency and a high-frequency filter using the thin-film piezoelectric acoustic wave resonator are provided without increasing the number of processes. At both ends of a vibrating part (1), fixing parts (8) are physically connected, and between the vibrating part (1) and each of the fixing parts (8), an acoustic insulating part (10) and a phase rotating part (11) are physically connected. As with the vibrating part (1), the acoustic insulating part (10) and the phase rotating part (11) are made up of an upper metal film (3), a piezoelectric thin film, and a lower metal film, and an acoustic wave reflector (6) is provided on each of an upper surface, a lower surface, and side surfaces of the vibrating part (1), the acoustic insulating part (10), and the phase rotating part (11). The vibrating part (1) has a width smaller than its length (La) and also smaller than its thickness, and width/thickness is smaller than 1.
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