发明申请
- 专利标题: HIGH-SPEED AND HIGH-RESOLUTION ATOMIC FORCE MICROSCOPE
- 专利标题(中): 高速和高分辨率原子力显微镜
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申请号: US13114642申请日: 2011-05-24
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公开(公告)号: US20110307980A1公开(公告)日: 2011-12-15
- 发明人: Yonmook Park , Dong Min Kim
- 申请人: Yonmook Park , Dong Min Kim
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2010-0056055 20100614
- 主分类号: G01Q60/24
- IPC分类号: G01Q60/24
摘要:
According to example embodiments, an atomic force microscope includes a probe tip, a cantilever including the probe tip, a displacement measurement device, and a movement device. A vibrating displacement of the cantilever changes according to a force between atoms of the probe tip and atoms of a surface of a sample. The displacement measurement device is configured to irradiate a beam emitted from a light source on the cantilever and to measure a displacement of the cantilever based on the beam reflected from the cantilever. The movement device is configured to move the cantilever and the displacement measurement device simultaneously when the sample is scanned.
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