发明申请
- 专利标题: Probe Card for Simultaneously Testing Multiple Dies
- 专利标题(中): 用于同时测试多个模具的探针卡
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申请号: US12817735申请日: 2010-06-17
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公开(公告)号: US20110309854A1公开(公告)日: 2011-12-22
- 发明人: You-Hua Chou , Yi-Jen Lai
- 申请人: You-Hua Chou , Yi-Jen Lai
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
In accordance with an embodiment, a probe card comprises a contact pad interface comprising front side contacts and back side contacts electrically coupled together. The front side contacts are arranged to simultaneously electrically couple respective bumps of a plurality of dies on a wafer, and the back side contacts are arranged to electrically couple respective contacts of a testing structure.
公开/授权文献
- US08564319B2 Probe card for simultaneously testing multiple dies 公开/授权日:2013-10-22
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