发明申请
- 专利标题: Thin Film Transistor and Method of Manufacturing the Same
- 专利标题(中): 薄膜晶体管及其制造方法
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申请号: US13165332申请日: 2011-06-21
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公开(公告)号: US20110315980A1公开(公告)日: 2011-12-29
- 发明人: Jae Ho Kim
- 申请人: Jae Ho Kim
- 优先权: KR10-2010-0059456 20100623
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L21/365
摘要:
Provided are a Thin Film Transistor (TFT) and a method of manufacturing the same. The TFT includes a gate electrode; a source electrode and a drain electrode spaced from the gate electrode in a vertical direction and spaced from each other in a horizontal direction; a gate insulation layer disposed between the gate electrode and the source and drain electrodes; and an active layer disposed between the gate insulation layer and the source and drain electrodes. The active layer is formed of a conductive oxide layer and comprises at least two layers having different conductivities according to an impurity doped into the conductive oxide layer.
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