发明申请
US20110318602A1 Metal-Coated Polyimide Resin Substrate with Excellent Thermal Aging Resistance Properties
审中-公开
金属涂层聚酰亚胺树脂基材具有优异的耐热老化性能
- 专利标题: Metal-Coated Polyimide Resin Substrate with Excellent Thermal Aging Resistance Properties
- 专利标题(中): 金属涂层聚酰亚胺树脂基材具有优异的耐热老化性能
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申请号: US13148708申请日: 2010-02-17
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公开(公告)号: US20110318602A1公开(公告)日: 2011-12-29
- 发明人: Taku Yoshida
- 申请人: Taku Yoshida
- 申请人地址: JP Tokyo
- 专利权人: JX NIPPON MINING & METALS CORPORATION
- 当前专利权人: JX NIPPON MINING & METALS CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-041814 20090225
- 国际申请: PCT/JP2010/052298 WO 20100217
- 主分类号: B32B27/06
- IPC分类号: B32B27/06 ; B32B33/00
摘要:
[Object] To provide a metal-coated polyimide resin substrate that does not deteriorate the initial adhesion between the metal-coated polyimide resin film and the metal layer and has high adhesion after aging at 150° C. for 168 hours.[Solution] A metal-coated polyimide resin substrate in which a barrier layer is formed by a wet process after performing surface modification to one surface or both surfaces of a polyimide resin film by a wet process or a dry process or a combination thereof, a seed layer is thereafter formed by a wet process or a dry process, and a conductive film is formed on a surface layer thereof by a wet process; wherein, at the peeling surface on the conductive film layer side after the metal-coated polyimide resin substrate is subject to a 90-degree peel test, the thickness of a mixed layer of polyimide residue and barrier metal layer residue according to in-depth profiling with a time-of-flight secondary ion mass spectrometer (TOF-SIMS) is 2.60 nm or less based on Si sputter rate conversion, and peel strength retention after an aging test at 150° C. for 168 hours (peel strength after aging at 150° C. for 168 hours/initial peel strength) is 50% or higher.
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