发明申请
US20110319584A1 ADAMANTANE DERIVATIVE, METHOD FOR PRODUCING SAME, POLYMER USING SAME AS STARTING MATERIAL, AND RESIN COMPOSITION
有权
亚胺衍生物,其制备方法,使用它作为起始材料的聚合物和树脂组合物
- 专利标题: ADAMANTANE DERIVATIVE, METHOD FOR PRODUCING SAME, POLYMER USING SAME AS STARTING MATERIAL, AND RESIN COMPOSITION
- 专利标题(中): 亚胺衍生物,其制备方法,使用它作为起始材料的聚合物和树脂组合物
-
申请号: US13254231申请日: 2010-02-10
-
公开(公告)号: US20110319584A1公开(公告)日: 2011-12-29
- 发明人: Yoshihisa Arai , Takehiko Isobe
- 申请人: Yoshihisa Arai , Takehiko Isobe
- 申请人地址: JP Tokyo
- 专利权人: MITSUBISHI GAS CHEMICAL COMPANY, INC
- 当前专利权人: MITSUBISHI GAS CHEMICAL COMPANY, INC
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-049224 20090303
- 国际申请: PCT/JP2010/051971 WO 20100210
- 主分类号: C08F120/10
- IPC分类号: C08F120/10 ; C07C69/74
摘要:
Provided are an adamantane derivative represented by the following formula (1), a method for producing the same, a polymer containing an acrylate compound having the adamantane structure represented by formula (1) in a repeat unit, and a functional resin composition which contains the polymer, has excellent alkali developability and substrate adhesiveness, and can improve the resolution and the line edge roughness as a chemically amplified resist sensitive to far-ultraviolet rays represented by KrF excimer laser light, ArF excimer laser light, F2 excimer laser light or EUV without spoiling fundamental properties thereof as a resist such as pattern forming properties, dry etching resistance, heat resistance and the like. In the formula, R1 through R3, which may be the same or different, each represent a hydrogen atom, an alkyl group having a carbon number of 1 to 3, or a halogen-containing alkyl group; R4 through R8, which may be the same or different, each represent an alkyl group having a carbon number of 1 to 3 or a halogen-containing alkyl group; X, which may be the same or different, represents a hydrogen atom, an alkyl group having a carbon number of 1 to 3, or a alkoxy group having a carbon number of 1 to 3; and n represents 14.
公开/授权文献
信息查询
IPC分类: