- 专利标题: ULTRAHIGH DENSITY VERTICAL NAND MEMORY DEVICE AND METHOD OF MAKING THEREOF
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申请号: US12827947申请日: 2010-06-30
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公开(公告)号: US20120001252A1公开(公告)日: 2012-01-05
- 发明人: Johann Alsmeier , Vinod Robert Purayath , Henry Chien , George Matamis , Yao-Sheng Lee , James Kai , Yuan Zhang
- 申请人: Johann Alsmeier , Vinod Robert Purayath , Henry Chien , George Matamis , Yao-Sheng Lee , James Kai , Yuan Zhang
- 申请人地址: US CA Milpitas
- 专利权人: SanDisk Corporation
- 当前专利权人: SanDisk Corporation
- 当前专利权人地址: US CA Milpitas
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L21/8246 ; H01L21/8247 ; H01L29/788 ; H01L21/336
摘要:
Monolithic, three dimensional NAND strings include a semiconductor channel, at least one end portion of the semiconductor channel extending substantially perpendicular to a major surface of a substrate, a plurality of control gate electrodes having a strip shape extending substantially parallel to the major surface of the substrate, the blocking dielectric comprising a plurality of blocking dielectric segments, a plurality of discrete charge storage segments, and a tunnel dielectric located between each one of the plurality of the discrete charge storage segments and the semiconductor channel.
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