发明申请
US20120007205A1 INFRARED IMAGING DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
红外成像装置及其制造方法

INFRARED IMAGING DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要:
Certain embodiments provide an infrared imaging device including: an SOI structure that is placed at a distance from a substrate, and includes: heat-sensitive diodes that detect infrared rays and convert the infrared rays into heat; and STI regions that separate the heat-sensitive diodes from one another; an interlayer insulating film that is stacked on the SOI structure; and supporting legs that are connected to the heat-sensitive diodes and vertical signal lines provided in outer peripheral regions of the heat-sensitive diodes. Each of the supporting legs includes: an interconnect unit that transmit signals to the vertical signal lines; and interlayer insulating layers that sandwich the interconnect unit, each bottom side of the interlayer insulating layers being located in a higher position than the SOI structure.
公开/授权文献
信息查询
0/0