发明申请
- 专利标题： FINE-STRUCTURE TRANSFER METHOD
- 专利标题（中）： 精细结构转移方法
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申请号： US13238735申请日： 2011-09-21
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公开(公告)号： US20120007280A1公开(公告)日： 2012-01-12
- 发明人: Kyoichi MORI , Naoaki YAMASHITA , Noritake SHIZAWA , Koji TSUSHIMA
- 申请人： Kyoichi MORI , Naoaki YAMASHITA , Noritake SHIZAWA , Koji TSUSHIMA
- 申请人地址： JP Tokyo
- 专利权人： HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人： HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2009-045623 20090227
- 主分类号： B28B11/08
- IPC分类号： B28B11/08
摘要：
A fine-structure transfer method in which a fine-featured pattern formed on one of the two surfaces of a stamper is pressed against a coating of a resist on one of the two surfaces of a transfer element so as to transfer the fine-featured pattern to the resist coating, wherein the atmosphere in the space between the stamper and the transfer element is replaced by the vapor of the resist before the stamper is pressed against the transfer element.
公开/授权文献
- US08333915B2 Fine-structure transfer method 公开/授权日：2012-12-18
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