发明申请
- 专利标题: SELF-ALIGNED CONTACT STRUCTURE LATERALLY ENCLOSED BY AN ISOLATION STRUCTURE OF A SEMICONDUCTOR DEVICE
- 专利标题(中): 通过半导体器件的隔离结构封装的自对准接触结构
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申请号: US13237268申请日: 2011-09-20
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公开(公告)号: US20120021581A1公开(公告)日: 2012-01-26
- 发明人: Thomas Werner , Frank Feustel , Kai Frohberg
- 申请人: Thomas Werner , Frank Feustel , Kai Frohberg
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBAL FOUNDRIES Inc.
- 当前专利权人: GLOBAL FOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 优先权: DE102008006960.4 20080131
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/762
摘要:
By forming an isolation structure that extends above the height level defined by the semiconductor material of an active region, respective recesses may be defined in combination with gate electrode structures of the completion of basic transistor structures. These recesses may be subsequently filled with an appropriate contact material, thereby forming large area contacts in a self-aligned manner without requiring deposition and patterning of an interlayer dielectric material. Thereafter, the first metallization layer may be formed, for instance, on the basis of well-established techniques wherein the metal lines may connect directly to respective “large area” contact elements.
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